000 00616nam a2200205 a 4500
003 (BD-SpBAUS)
005 20230807094352.0
008 230807s2002 |||a|||| |||| 001 0 eng d
040 _aBD-SpBAUS
_cBD-SpBAUS
041 _aeng
082 _223
_a620.44
_bOHM 2002
100 _aOhring, Milton
_91805
245 _aMaterials Science of Thin Films Deposition and Structure /
_cMilton Ohring.
250 _a2nd ed.
260 _aNew Delhi :
_bAcademic Press,
_c 2002
300 _axxi, 794 p. :
_bill. ;
_c26 cm.
504 _ainclude index and bibliographical references
650 _aThin films
942 _2ddc
_cBK
_n0
999 _c753
_d753