| 000 | 00770nam a2200241 a 4500 | ||
|---|---|---|---|
| 003 | (BD-SpBAUS) | ||
| 005 | 20230724102248.0 | ||
| 008 | 230724s2018 |||a|||| |||| 001 0 eng d | ||
| 020 | _a9780128123119 | ||
| 040 |
_aBD-SpBAUS _cBD-SpBAUS |
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| 041 | _aeng | ||
| 082 |
_223 _a621.38152 _bHAN 2018 |
||
| 245 |
_aHandbook of Thin Film Deposition / _cEdited by Krishna Seshan and Dominic Schepis. |
||
| 250 | _a4th ed. | ||
| 260 |
_aUnited States: _bMatthew deans, _cc2018 |
||
| 300 |
_axx, 448p. : _bill. ; _c24 cm. |
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| 504 | _aInclude index and references | ||
| 650 |
_aThin films _91775 |
||
| 650 |
_aThin film devices--Design and construction _91776 |
||
| 650 |
_aThin films--Design and construction _91777 |
||
| 700 |
_aSeshan, Krishna _91778 |
||
| 942 |
_2ddc _cBK _n0 |
||
| 999 |
_c742 _d742 |
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