TY  - BOOK
AU  - Seshan, Krishna
TI  - Handbook of Thin Film Deposition
SN  - 9780128123119
U1  - 621.38152 23
PY  - 2018///
CY  - United States
PB  - Matthew deans
KW  - Thin films
KW  - Thin film devices--Design and construction
KW  - Thin films--Design and construction
N1  - Include index and references
ER  -