Handbook of Thin Film Deposition / 
Edited by Krishna Seshan and Dominic Schepis. 
 - 4th ed. 
 - United States:  Matthew deans,  c2018 
 - xx, 448p. :  ill. ;  24 cm. 
<br/><br/>Include index and references 
<br/><br/><label>ISBN: </label>9780128123119 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Thin films<br/>Thin film devices--Design and construction<br/>Thin films--Design and construction
<br/><br/><label>Dewey Class. No.: </label>621.38152  / HAN 2018